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[EI]空心阴极电子束对多弧离子镀TiAlN薄膜组织形貌及摩擦学性能的影响

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Affiliation of Author(s):材料科学工程学院

Journal:真空科学与技术学报

Funded by:省、市、自治区科技项目

First Author:wuhua

Indexed by:Journal paper

Page Number:3

Translation or Not:no

Date of Publication:2012-01-10