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所属单位：电气与电子工程学院

教研室：电气与电子工程学院

发表刊物：Mathematical Problems in Engineering

项目来源：主管部门科技项目

关键字：Testing Method，Grating Films，tool edge indentation

摘要：.e manufacturing process of large-area, high-precision gratings is a very complicated and time-consuming process..e hardness testing of grating films is an important step in the entire process. In order to simplify the manufacturing process of gratings, we have proposed a new method for testing microhardness based on tool edge indentation. Also, it unified tool adjustment and microhardness testing steps in the grating manufacturing process. First, a mathematical model of the relationship between tool load and indentation contour length is established. .e model parameters were then modified using tool indentation experiments with different loads. When measured with a nanoindenter, the average hardness of the grating film was 447 MPa. .e hardness value of the grating film obtained by our proposed method is almost the same as that measured by the nanoindenter, and the maximum deviation is about 2.2% of the average hardness value. .e experimental results show that our proposed method can replace the microhardness test method of using a nanoindenter. .erefore, the disadvantages of using a nanoindenter to test the hardness of a grating film are avoided, such as the limited sample size, the sensitivity of the indenter to the roughness of the film and the depth of the indentation, and the accuracy of film testing, and the efficiency of grating ruling can be improved.

合写作者：金一,吉日嘎兰图

第一作者：马海涛

论文类型：期刊论文

卷号：2020

页面范围：1

ISSN号：1024-123X

是否译文：否

CN号：LI0QC

发表时间：2020-03-01