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马海涛

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AOD炉喷溅控制系统

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Affilication of Author(s):电气与电子工程学院

Teaching and Research Group:电气与电子工程学院

Scope of patent:国内

School Sign:第一单位

Type of Patent:实用新型

State of Patent:专利授权

Application Number:ZL201320481186.8

Authorization number:CN203373385U

Number of Inventors:3

Service Invention or Not:no

Application Date:2013-08-08

Authorization Date:2013-11-28