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所属单位：材料科学工程学院

教研室：材料科学工程学院

发表刊物：Bulletin of Materials Science

项目来源：自选课题

关键字：Deposition buffer layer optical properties sputtering

摘要：The aluminium-doped zinc oxide with Al2O3Al2O3 buffer layer (AZO/Al2O3)(AZO/Al2O3) films were deposited on the polyethylene terephthalate substrates by radiofrequency magnetron sputtering. Compared with the AZO films without Al2O3Al2O3 buffer layer, the crystallite size and (002) peak of the AZO/Al2O3AZO/Al2O3 films changed with the deposition times; the full-width at half-maximum (FWHM) of (002) peak decreases from 0 to 25 min. The effects of Al2O3Al2O3 buffer layer on the surface morphology of AZO/Al2O3AZO/Al2O3 and optical properties of films were investigated by SEM and UV–Vis–NIR spectrophotometer, respectively. The results reveal that the average transmittance of the AZO films in the visible wavelength region is ～90%～90% , stronger deep level emissions centred on 550 nm is attributed to intrinsic defects in the AZO films on the organic polymer PET substrates.

合写作者：王新月,韩英,陈华,刘耀东

第一作者：刘耀东

论文类型：期刊论文

卷号：41

页面范围：1

是否译文：否

发表时间：2018-08-01